Introduction. Morphological changes in the free surface of materials during loading are interesting from a fundamental and practical point of view. In the first case, through the deformation relief, scientists judge the processes taking place inside the material, identify the deformation mechanisms, analyze the change in the stress-strain state, etc. In the second case, the deformation relief is an undesirable phenomenon, because it worsens fatigue resistance, adhesion, leads to cracking and reduces other physical and mechanical properties of machine parts. In addition, on the basis of the deformation relief, scientists try to evaluate the residual life of the machine parts. Today, industry uses materials in various structural conditions. The microstructure of the metal (the presence or absence of grains and grain boundaries, grain size, texture, crystallographic orientation, etc.) has a significant effect on the nature of the course of plastic deformation and the morphology of the deformed surface. The purpose of the work is to study the influence of the material structure on the evolution of the surface morphology during deformation. For this purpose, nickel samples in a single-crystal, polycrystalline, and ultrafine-grained state are investigated. The methods of investigation are mechanical compression tests, confocal laser scanning microscopy. Quantification is carried out using standardized three-dimensional roughness parameters. Results and Discussion. The paper shows the influence of the internal structure of the material on the evolution of the morphology of the deformation surface. Changes in the strain relief are discussed in terms of the prevailing strain mechanisms for each structural state of the material. It is shown that using three-dimensional roughness parameters, one can evaluate the presence of potential stress concentrators on the surface. It is determined that the presence of deep sharp depressions is most inherent in the material in a polycrystalline state. The results of the work can be useful for a reasoned choice of the microstructure of the material in the manufacture of machine parts and for mathematical modeling of the behavior of metals under load.